KO CHANG GI Ju Byeong Kwon LEE YUN HI Jung Ho Park OH MYUNG HWAN 2024-01-13T21:02:43Z 2024-01-13T21:02:43Z 2021-09-29 https://pubs.kist.re.kr/handle/201004/111379 English field emitter CVD coatings carbon electron field emission vacuum microelectronics field emission display micromachining DLC-coated silicon tip Fabrication and characterization of DLC-coated field emitter arrays Conference 1 Technical digest of 9th international vacuum microelectronics conference, St. Petersburg, Russia., pp.226 - 230 Technical digest of 9th international vacuum microelectronics conference, St. Petersburg, Russia. 226 230 KO