KIM EUN KYU S.I. Kim M.S. Kim Y. Kim S.M. Hwang B.D. Min C.S. Son Min Suk-Ki 2024-01-13T21:02:45Z 2024-01-13T21:02:45Z 2021-09-29 https://pubs.kist.re.kr/handle/201004/111381 English lateral growth rate Enhancement of lateral growth rate during MOCVD growth on patterned GaAs substrates with CBr//4. Conference 1 Digest of Papers on the 9th Int'l Micro-process Conference., pp.116 - 169 Digest of Papers on the 9th Int'l Micro-process Conference. 116 169 JA