최우범 Ju Byeong Kwon LEE YUN HI S. J. Jeong M. R. Haskard LEE NAM YANG 성만영 OH MYUNG HWAN 2024-01-13T21:03:57Z 2024-01-13T21:03:57Z 2021-09-29 https://pubs.kist.re.kr/handle/201004/111454 English MEMS Experimental analysis of the process of anodic bonding with an evaporated glass layer Conference 1 MRS 1996 fall meeting, Boston, USA., pp.? MRS 1996 fall meeting, Boston, USA. ? ? US