Lee Kwang Ryeol EUN KWANG YONG 김명근 최준엽 2024-01-13T21:04:07Z 2024-01-13T21:04:07Z 2021-09-29 https://pubs.kist.re.kr/handle/201004/111463 English diamond-like carbon Structure and mechanical properties of Si incorporated diamond-like carbon films prepared by PACVD. Conference 2 Proceedings of the 1st international diamond symposium, 5-7 November 1996, Seoul, Korea, pp.164 - 169 Proceedings of the 1st international diamond symposium, 5-7 November 1996, Seoul, Korea 164 169 KO