SON JUNG YOUNG Yu. N. Lokhov I. V. Moskalev 2024-01-13T21:30:52Z 2024-01-13T21:30:52Z 2021-09-29 https://pubs.kist.re.kr/handle/201004/111550 English Ultra-high precision grinding of the glass surface by the surface-charged abrasive tool. Conference 1 SPIE proc. : optics for science and new technology, v.v. 2778, pp.1014 SPIE proc. : optics for science and new technology v. 2778 1014 1014 US