Kim Tae Song Dong-Joo Kim Lee Jeon Kook 정형진 2024-01-13T21:32:06Z 2024-01-13T21:32:06Z 2021-09-29 https://pubs.kist.re.kr/handle/201004/111629 English non-volatile memory PZT sputtering process Ferroelectric thin films Low temperature growth of PZT(52/48) thin films using r.f. magnetron sputtering method Conference 1 Ferroelectric thin films V, Mat. res. soc. symp. proc., v.433, pp.243 - 247 Ferroelectric thin films V, Mat. res. soc. symp. proc. 433 243 247 US