KIM YOUN KIM MOO SUNG Kim Seong Il 황성민 KANG JOON MO 박양근 Min Suk-Ki 2024-01-13T22:03:45Z 2024-01-13T22:03:45Z 2021-09-29 https://pubs.kist.re.kr/handle/201004/111984 English MOCVD Enhancement of side wall growth rate during MOVPE growth on patterned substrates with CCl//4. Conference 1 The 1st inter. conf. on low dimensional structures and devices, pp.27 - ? The 1st inter. conf. on low dimensional structures and devices 27 ? SI