Kim Yong Tae 이창우 권철순 2024-01-13T22:30:38Z 2024-01-13T22:30:38Z 2021-09-29 https://pubs.kist.re.kr/handle/201004/112066 English Thermal stability of plasma deposited tungsten nitride thin films for VLSI devices. Conference 1 1-st China-Korea sym. on thin film materials, pp.? 1-st China-Korea sym. on thin film materials ? ? CC