Kim Yong Tae 이창우 Min Suk-Ki 2024-01-13T22:33:37Z 2024-01-13T22:33:37Z 2021-09-29 https://pubs.kist.re.kr/handle/201004/112245 English Performance of plasma deposited tungsten nitride diffusion barrier for Al and Au metallizations. Conference 1 6th int'l conf. on microprocess, Hiroshima, pp.? 6th int'l conf. on microprocess, Hiroshima ? ? JA