Cho Won Il 주재백 이철환 Yun Kyung Suk 2024-01-13T23:03:14Z 2024-01-13T23:03:14Z 2021-09-29 https://pubs.kist.re.kr/handle/201004/112488 English metal/insulator/semiconductor p-type silicon silicon oxide hydrogen response time regeneration time voltage shift palladium surface coverage Hydrogen sensing properties of Pd-MIS sensors. Conference 2 Proceedings of the Korea-Japan joint symposium on chemical sensors, pp.128 - 133 Proceedings of the Korea-Japan joint symposium on chemical sensors 128 133 KO