KANG KWANG NHAM Lee Jung Il J. H. Jo Han Il Ki Y. J. Lee 2024-01-13T23:31:15Z 2024-01-13T23:31:15Z 2021-09-29 https://pubs.kist.re.kr/handle/201004/112637 English silicon nitride films Growth and characterization of silicon nitride films by PECVD. Conference 1 5th ICSFS, Brown U., Providence, USA, Aug. 13-17, 1990, pp.? 5th ICSFS, Brown U., Providence, USA, Aug. 13-17, 1990 ? ? US