S. R. Turner Ahn Kwang-Duk C. G. Willson 2024-01-13T23:34:25Z 2024-01-13T23:34:25Z 2021-09-29 0743-0515 https://pubs.kist.re.kr/handle/201004/112822 English American Chemical Society Thermally stable, deep UV resist materials Conference 1 Polymeric materials : science and engineering, proceedings of the ACS Division of Polymeric Materials, Science and Engineering, v.55, pp.608 - 609 Polymeric materials : science and engineering, proceedings of the ACS Division of Polymeric Materials, Science and Engineering 55 608 609 US A1986F867902923