CHOI, WON KOOK 2024-01-14T00:00:51Z 2024-01-14T00:00:51Z 2022-01-14 1989-07-01 https://pubs.kist.re.kr/handle/201004/112882 CO2 laser-induced CVD법에 의한 silicon박막 및 p-n접합 silicon 제작 Silicon thin film and p-n junction diode made by CO2 laser-induced CVD method Conference 2 한국진공학회, pp.115 - 119 한국진공학회 115 119 The proceedings of the 4th applied physics symposium on the surface and interface