Lee, Ju Young Shin, Jongwoon Kim, Kyubeen Ju, Jeong Eun Dutta, Ankan Kim, Tae Soo Cho, Young Uk Kim, Taemin Hu, Luhing Min, Won Kyung Jung, Hyun-Suh Park, Young Sun Won, Sang Min Yeo, Woon-Hong Moon, Jooho Khang, Dahl-Young Kim, Hyun Jae Ahn, Jong-Hyun Cheng, Huanyu Yu, Ki Jun Rogers, John A. 2024-01-19T09:00:55Z 2024-01-19T09:00:55Z 2023-06-15 2023-09 1613-6810 https://pubs.kist.re.kr/handle/201004/113364 Ultrathin crystalline silicon is widely used as an active material for high-performance, flexible, and stretchable electronics, from simple passive and active components to complex integrated circuits, due to its excellent electrical and mechanical properties. However, in contrast to conventional silicon wafer-based devices, ultrathin crystalline silicon-based electronics require an expensive and rather complicated fabrication process. Although silicon-on-insulator (SOI) wafers are commonly used to obtain a single layer of crystalline silicon, they are costly and difficult to process. Therefore, as an alternative to SOI wafers-based thin layers, here, a simple transfer method is proposed for printing ultrathin multiple crystalline silicon sheets with thicknesses between 300 nm to 13 mu m and high areal density (>90%) from a single mother wafer. Theoretically, the silicon nano/micro membrane can be generated until the mother wafer is completely consumed. In addition, the electronic applications of silicon membranes are successfully demonstrated through the fabrication of a flexible solar cell and flexible NMOS transistor arrays. English Wiley - V C H Verlag GmbbH & Co. Ultrathin Crystalline Silicon Nano and Micro Membranes with High Areal Density for Low-Cost Flexible Electronics Article 10.1002/smll.202302597 1 Small, v.19, no.39 Small 19 39 N scie scopus 000995994300001 2-s2.0-85160290134 Chemistry, Multidisciplinary Chemistry, Physical Nanoscience & Nanotechnology Materials Science, Multidisciplinary Physics, Applied Physics, Condensed Matter Chemistry Science & Technology - Other Topics Materials Science Physics Article THIN-FILM TRANSISTORS SEMICONDUCTOR GROWTH SOLAR-CELLS OXIDE SURFACE ARRAYS ORIENTATION FABRICATION CHALLENGES INTERFACE flexible electronics reusable silicon semiconductor electronics applications silicon nano micro membrane sheet transfer