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<dcvalue element="contributor" qualifier="author">Silva,&#x20;Jose&#x20;P.&#x20;B.</dcvalue>
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<dcvalue element="contributor" qualifier="author">Begon-Lours,&#x20;Laura</dcvalue>
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<dcvalue element="contributor" qualifier="author">Byun,&#x20;Seungyong</dcvalue>
<dcvalue element="contributor" qualifier="author">Chang,&#x20;Sou-Chi</dcvalue>
<dcvalue element="contributor" qualifier="author">Cheong,&#x20;Sang-Wook</dcvalue>
<dcvalue element="contributor" qualifier="author">Choe,&#x20;Duk-Hyun</dcvalue>
<dcvalue element="contributor" qualifier="author">Coignus,&#x20;Jean</dcvalue>
<dcvalue element="contributor" qualifier="author">Deshpande,&#x20;Veeresh</dcvalue>
<dcvalue element="contributor" qualifier="author">Dimoulas,&#x20;Athanasios</dcvalue>
<dcvalue element="contributor" qualifier="author">Dubourdieu,&#x20;Catherine</dcvalue>
<dcvalue element="contributor" qualifier="author">Fina,&#x20;Ignasi</dcvalue>
<dcvalue element="contributor" qualifier="author">Funakubo,&#x20;Hiroshi</dcvalue>
<dcvalue element="contributor" qualifier="author">Grenouillet,&#x20;Laurent</dcvalue>
<dcvalue element="contributor" qualifier="author">Gruverman,&#x20;Alexei</dcvalue>
<dcvalue element="contributor" qualifier="author">Heo,&#x20;Jinseong</dcvalue>
<dcvalue element="contributor" qualifier="author">Hoffmann,&#x20;Michael</dcvalue>
<dcvalue element="contributor" qualifier="author">Hsain,&#x20;H.&#x20;Alex</dcvalue>
<dcvalue element="contributor" qualifier="author">Huang,&#x20;Fei-Ting</dcvalue>
<dcvalue element="contributor" qualifier="author">Hwang,&#x20;Cheol&#x20;Seong</dcvalue>
<dcvalue element="contributor" qualifier="author">Iniguez,&#x20;Jorge</dcvalue>
<dcvalue element="contributor" qualifier="author">Jones,&#x20;Jacob&#x20;L.</dcvalue>
<dcvalue element="contributor" qualifier="author">Karpov,&#x20;Ilya&#x20;V.</dcvalue>
<dcvalue element="contributor" qualifier="author">Kersch,&#x20;Alfred</dcvalue>
<dcvalue element="contributor" qualifier="author">Kwon,&#x20;Taegyu</dcvalue>
<dcvalue element="contributor" qualifier="author">Lancaster,&#x20;Suzanne</dcvalue>
<dcvalue element="contributor" qualifier="author">Lederer,&#x20;Maximilian</dcvalue>
<dcvalue element="contributor" qualifier="author">Lee,&#x20;Younghwan</dcvalue>
<dcvalue element="contributor" qualifier="author">Lomenzo,&#x20;Patrick&#x20;D.</dcvalue>
<dcvalue element="contributor" qualifier="author">Martin,&#x20;Lane&#x20;W.</dcvalue>
<dcvalue element="contributor" qualifier="author">Martin,&#x20;Simon</dcvalue>
<dcvalue element="contributor" qualifier="author">Migita,&#x20;Shinji</dcvalue>
<dcvalue element="contributor" qualifier="author">Mikolajick,&#x20;Thomas</dcvalue>
<dcvalue element="contributor" qualifier="author">Noheda,&#x20;Beatriz</dcvalue>
<dcvalue element="contributor" qualifier="author">Park,&#x20;Min&#x20;Hyuk</dcvalue>
<dcvalue element="contributor" qualifier="author">Rabe,&#x20;Karin&#x20;M.</dcvalue>
<dcvalue element="contributor" qualifier="author">Salahuddin,&#x20;Sayeef</dcvalue>
<dcvalue element="contributor" qualifier="author">Sanchez,&#x20;Florencio</dcvalue>
<dcvalue element="contributor" qualifier="author">Seidel,&#x20;Konrad</dcvalue>
<dcvalue element="contributor" qualifier="author">Shimizu,&#x20;Takao</dcvalue>
<dcvalue element="contributor" qualifier="author">Shiraishi,&#x20;Takahisa</dcvalue>
<dcvalue element="contributor" qualifier="author">Slesazeck,&#x20;Stefan</dcvalue>
<dcvalue element="contributor" qualifier="author">Toriumi,&#x20;Akira</dcvalue>
<dcvalue element="contributor" qualifier="author">Uchida,&#x20;Hiroshi</dcvalue>
<dcvalue element="contributor" qualifier="author">Vilquin,&#x20;Bertrand</dcvalue>
<dcvalue element="contributor" qualifier="author">Xu,&#x20;Xianghan</dcvalue>
<dcvalue element="contributor" qualifier="author">Ye,&#x20;Kun&#x20;Hee</dcvalue>
<dcvalue element="contributor" qualifier="author">Schroeder,&#x20;Uwe</dcvalue>
<dcvalue element="date" qualifier="accessioned">2024-01-19T09:01:14Z</dcvalue>
<dcvalue element="date" qualifier="available">2024-01-19T09:01:14Z</dcvalue>
<dcvalue element="date" qualifier="created">2023-10-29</dcvalue>
<dcvalue element="date" qualifier="issued">2023-08</dcvalue>
<dcvalue element="identifier" qualifier="uri">https:&#x2F;&#x2F;pubs.kist.re.kr&#x2F;handle&#x2F;201004&#x2F;113376</dcvalue>
<dcvalue element="description" qualifier="abstract">Ferroelectric&#x20;hafnium&#x20;and&#x20;zirconium&#x20;oxides&#x20;have&#x20;undergone&#x20;rapid&#x20;scientific&#x20;development&#x20;over&#x20;the&#x20;last&#x20;decade,&#x20;pushing&#x20;them&#x20;to&#x20;the&#x20;forefront&#x20;of&#x20;ultralow-power&#x20;electronic&#x20;systems.&#x20;Maximizing&#x20;the&#x20;potential&#x20;application&#x20;in&#x20;memory&#x20;devices&#x20;or&#x20;supercapacitors&#x20;of&#x20;these&#x20;materials&#x20;requires&#x20;a&#x20;combined&#x20;effort&#x20;by&#x20;the&#x20;scientific&#x20;community&#x20;to&#x20;address&#x20;technical&#x20;limitations,&#x20;which&#x20;still&#x20;hinder&#x20;their&#x20;application.&#x20;Besides&#x20;their&#x20;favorable&#x20;intrinsic&#x20;material&#x20;properties,&#x20;HfO2-ZrO2&#x20;materials&#x20;face&#x20;challenges&#x20;regarding&#x20;their&#x20;endurance,&#x20;retention,&#x20;wake-up&#x20;effect,&#x20;and&#x20;high&#x20;switching&#x20;voltages.&#x20;In&#x20;this&#x20;Roadmap,&#x20;we&#x20;intend&#x20;to&#x20;combine&#x20;the&#x20;expertise&#x20;of&#x20;chemistry,&#x20;physics,&#x20;material,&#x20;and&#x20;device&#x20;engineers&#x20;from&#x20;leading&#x20;experts&#x20;in&#x20;the&#x20;ferroelectrics&#x20;research&#x20;community&#x20;to&#x20;set&#x20;the&#x20;direction&#x20;of&#x20;travel&#x20;for&#x20;these&#x20;binary&#x20;ferroelectric&#x20;oxides.&#x20;Here,&#x20;we&#x20;present&#x20;a&#x20;comprehensive&#x20;overview&#x20;of&#x20;the&#x20;current&#x20;state&#x20;of&#x20;the&#x20;art&#x20;and&#x20;offer&#x20;readers&#x20;an&#x20;informed&#x20;perspective&#x20;of&#x20;where&#x20;this&#x20;field&#x20;is&#x20;heading,&#x20;what&#x20;challenges&#x20;need&#x20;to&#x20;be&#x20;addressed,&#x20;and&#x20;possible&#x20;applications&#x20;and&#x20;prospects&#x20;for&#x20;further&#x20;development.&#x20;(c)&#x20;2023&#x20;Author(s).&#x20;All&#x20;article&#x20;content,&#x20;except&#x20;where&#x20;otherwise&#x20;noted,&#x20;is&#x20;licensed&#x20;under&#x20;a&#x20;Creative&#x20;Commons&#x20;Attribution&#x20;(CC&#x20;BY)&#x20;license&#x20;(http:&#x2F;&#x2F;creativecommons.org&#x2F;licenses&#x2F;by&#x2F;4.0&#x2F;).&#x20;https:&#x2F;&#x2F;doi.org&#x2F;10.1063&#x2F;5.0148068</dcvalue>
<dcvalue element="language" qualifier="none">English</dcvalue>
<dcvalue element="publisher" qualifier="none">American&#x20;Institute&#x20;of&#x20;Physics&#x20;Publising&#x20;LLC</dcvalue>
<dcvalue element="title" qualifier="none">Roadmap&#x20;on&#x20;ferroelectric&#x20;hafnia-&#x20;and&#x20;zirconia-based&#x20;materials&#x20;and&#x20;devices</dcvalue>
<dcvalue element="type" qualifier="none">Article</dcvalue>
<dcvalue element="identifier" qualifier="doi">10.1063&#x2F;5.0148068</dcvalue>
<dcvalue element="description" qualifier="journalClass">1</dcvalue>
<dcvalue element="identifier" qualifier="bibliographicCitation">APL&#x20;Materials,&#x20;v.11,&#x20;no.8</dcvalue>
<dcvalue element="citation" qualifier="title">APL&#x20;Materials</dcvalue>
<dcvalue element="citation" qualifier="volume">11</dcvalue>
<dcvalue element="citation" qualifier="number">8</dcvalue>
<dcvalue element="description" qualifier="isOpenAccess">Y</dcvalue>
<dcvalue element="description" qualifier="journalRegisteredClass">scie</dcvalue>
<dcvalue element="description" qualifier="journalRegisteredClass">scopus</dcvalue>
<dcvalue element="identifier" qualifier="wosid">001063426400002</dcvalue>
<dcvalue element="identifier" qualifier="scopusid">2-s2.0-85170280278</dcvalue>
<dcvalue element="relation" qualifier="journalWebOfScienceCategory">Nanoscience&#x20;&amp;&#x20;Nanotechnology</dcvalue>
<dcvalue element="relation" qualifier="journalWebOfScienceCategory">Materials&#x20;Science,&#x20;Multidisciplinary</dcvalue>
<dcvalue element="relation" qualifier="journalWebOfScienceCategory">Physics,&#x20;Applied</dcvalue>
<dcvalue element="relation" qualifier="journalResearchArea">Science&#x20;&amp;&#x20;Technology&#x20;-&#x20;Other&#x20;Topics</dcvalue>
<dcvalue element="relation" qualifier="journalResearchArea">Materials&#x20;Science</dcvalue>
<dcvalue element="relation" qualifier="journalResearchArea">Physics</dcvalue>
<dcvalue element="type" qualifier="docType">Article</dcvalue>
<dcvalue element="subject" qualifier="keywordPlus">ATOMIC&#x20;LAYER&#x20;DEPOSITION</dcvalue>
<dcvalue element="subject" qualifier="keywordPlus">HF0.5ZR0.5O2&#x20;THIN-FILMS</dcvalue>
<dcvalue element="subject" qualifier="keywordPlus">DOPED&#x20;HFO2&#x20;FILMS</dcvalue>
<dcvalue element="subject" qualifier="keywordPlus">NEGATIVE&#x20;CAPACITANCE</dcvalue>
<dcvalue element="subject" qualifier="keywordPlus">ENERGY-STORAGE</dcvalue>
<dcvalue element="subject" qualifier="keywordPlus">PHASE-TRANSITIONS</dcvalue>
<dcvalue element="subject" qualifier="keywordPlus">SWITCHING&#x20;KINETICS</dcvalue>
<dcvalue element="subject" qualifier="keywordPlus">SINGLE-CRYSTALS</dcvalue>
<dcvalue element="subject" qualifier="keywordPlus">DOMAIN-WALL</dcvalue>
<dcvalue element="subject" qualifier="keywordPlus">WAKE-UP</dcvalue>
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