Jang, Hyeong-Soon Lee, Donghwa Heo, Hyungjun Kim, Yong-Su Lim, Hyang-Tag Jeon, Seung -Woo 문성욱 Kim, Sangin Han, Sang-Wook Jung, Hojoong 2024-01-19T09:04:08Z 2024-01-19T09:04:08Z 2023-08-17 2023-07 2327-9125 https://pubs.kist.re.kr/handle/201004/113506 We demonstrate integrated photonic circuits for quantum devices using sputtered polycrystalline aluminum nitride (AlN) on insulator. On-chip AlN waveguide directional couplers, which are one of the most important components in quantum photonics, are fabricated and show the output power splitting ratios from 50:50 to 99:1. Polarization beam splitters with an extinction ratio of more than 10 dB are also realized from the AlN directional couplers. Using the fabricated AlN waveguide beam splitters, we observe Hong-Ou-Mandel interference with a visibility of 91.7% & PLUSMN; 5.66%. English OSA Publishing Aluminum nitride waveguide beam splitters for integrated quantum photonic circuits Article 10.1364/PRJ.461723 1 Photonics Research, v.11, no.7, pp.1196 - 1202 Photonics Research 11 7 1196 1202 N scie scopus 001033634200007 Optics Optics Article POLARIZATION SPLITTER THIN-FILM SILICON WAVELENGTH PLATFORM COMPACT