Kim, Moohyuk Park, Nu-Ri Yu, Aran Kim, Jin Tae Jeon, Minseok Jeon, Seung-Woo Han, Sang-Wook Kim, Myung-Ki 2024-01-19T09:32:21Z 2024-01-19T09:32:21Z 2023-03-02 2023-06 2192-8606 https://pubs.kist.re.kr/handle/201004/113724 Metasurface technology is revolutionizing the field of optics and pursuing expanded functions via technical developments, such as the integration of multiple metasurfaces with optical fibers. Despite several attempts to realize metasurface-on-fiber platforms, negligible fiber-facet areas pose a serious obstacle to efficient and precise fabrication. Herein, we demonstrate a novel sequential micro-punching process that enables rapid and precise stacking of multiple polymer metasurfaces on the end face of a single-mode optical fiber. Mesh-type nanohole metasurfaces are fabricated on a 1.8-mu m-thick polymethyl methacrylate (PMMA) layer via e-beam lithography, and the PMMA layer is separated from the substrate and prepared in the form of a membrane using the external frame. Furthermore, the PMMA metasurfaces are sequentially punched through the fiber and stacked on top. Employing a micro-punching process, we demonstrate highly efficient all-polymer metalenses and orbital angular momentum (OAM) metasurfaces coupled with single-mode fibers operating in the telecommunication band. A 1550 nm laser beam passing through three metalens layers stacked on the fiber is focused at a distance of 135 mu m with 83% efficiency. In addition, the 1550 nm beam passing through three OAM metasurfaces on the fiber is converted into a perfect vortex beam with a topological charge of 3. We believe that our proposed micro-punching process will cause a breakthrough in the fabrication of metasurface-integrated optical fibers that will be utilized in a wide range of applications. English WALTER DE GRUYTER GMBH Multilayer all-polymer metasurface stacked on optical fiber via sequential micro-punching process Article 10.1515/nanoph-2022-0762 1 Nanophotonics, v.12, no.13, pp.2359 - 2369 Nanophotonics 12 13 2359 2369 Y scie scopus 000931003000001 2-s2.0-85147902520 Nanoscience & Nanotechnology Materials Science, Multidisciplinary Optics Physics, Applied Science & Technology - Other Topics Materials Science Optics Physics Article PERFECT VORTEX GENERATION PLATFORM CLOAK BEAM metalenses metasurface-on-fiber metasurfaces OAM metasurfaces polymer metasurfaces