Ryu, Huije Lee, Yunah Jeong, Jae Hwan Yangjin Lee Cheon, Yeryun Watanabe, Kenji Taniguchi, Takashi Kim, Kwanpyo Cheong, Hyeonsik Lee, Chul-Ho Lee, Gwan-Hyoung 2024-01-19T10:00:36Z 2024-01-19T10:00:36Z 2023-02-17 2023-04 1613-6810 https://pubs.kist.re.kr/handle/201004/113889 Transition metal dichalcogenides exhibit phase transitions through atomic migration when triggered by various stimuli, such as strain, doping, and annealing. However, since atomically thin 2D materials are easily damaged and evaporated from these strategies, studies on the crystal structure and composition of transformed 2D phases are limited. Here, the phase and composition change behavior of laser-irradiated molybdenum ditelluride (MoTe2) in various stacked geometry are investigated, and the stable laser-induced phase patterning in hexagonal boron nitride (hBN)-encapsulated MoTe2 is demonstrated. When air-exposed or single-side passivated 2H-MoTe2 are irradiated by a laser, MoTe2 is transformed into Te or Mo3Te4 due to the highly accumulated heat and atomic evaporation. Conversely, hBN-encapsulated 2H-MoTe2 transformed into a 1T ' phase without evaporation or structural degradation, enabling stable phase transitions in desired regions. The laser-induced phase transition shows layer number dependence; thinner MoTe2 has a higher phase transition temperature. From the stable phase patterning method, the low contact resistivity of 1.13 k omega mu m in 2H-MoTe2 field-effect transistors with 1T ' contacts from the seamless heterophase junction geometry is achieved. This study paves an effective way to fabricate monolithic 2D electronic devices with laterally stitched phases and provides insights into phase and compositional changes in 2D materials. English Wiley - V C H Verlag GmbbH & Co. Laser-Induced Phase Transition and Patterning of hBN-Encapsulated MoTe2 Article 10.1002/smll.202205224 1 Small, v.19, no.17 Small 19 17 N scie scopus 000919906400001 2-s2.0-85146702802 Chemistry, Multidisciplinary Chemistry, Physical Nanoscience & Nanotechnology Materials Science, Multidisciplinary Physics, Applied Physics, Condensed Matter Chemistry Science & Technology - Other Topics Materials Science Physics Article; Early Access OPTICAL-PROPERTIES CONTACT FILMS FIELD-EFFECT TRANSISTORS FEW-LAYER MOTE2 THERMAL-CONDUCTIVITY van der waals heterostructures 2D materials lasers molybdenum ditelluride phase transition