Shim, Joonsup Lim, Jinha Geum, Dae-Myeong You, Jong-Bum Yoon, Hyeonho Kim, Joon Pyo Baek, Woo Jin Kim, Inki Han, Jae-Hoon Kim, SangHyeon 2024-01-19T10:34:00Z 2024-01-19T10:34:00Z 2023-01-26 2022-11 1094-4087 https://pubs.kist.re.kr/handle/201004/114283 Conventional photon detectors necessarily face critical challenges regarding strong wavelength-selective response and narrow spectral bandwidth, which are undesirable for spectroscopic applications requiring a wide spectral range. With this perspective, herein, we overcome these challenges through a free-carrier absorption-based waveguide-integrated bolometer for infrared spectroscopic sensors on a silicon-on-insulator (SOI) platform featuring a spectrally flat response at near-infrared (NIR) range (1520-1620 nm). An in-depth thermal analysis was conducted with a systematic investigation of geometry dependence on the detectors. We achieved great performances: temperature coefficient of resistance (TCR) of -3.786%/K and sensitivity of -26.75%/mW with a low wavelength dependency, which are record-high values among reported waveguide bolometers so far, to our knowledge. In addition, a clear on-off response with the rise/fall time of 24.2/29.2 mu s and a 3-dB roll-off frequency of similar to 22 kHz were obtained, sufficient for a wide range of sensing applications. Together with the possibility of expanding an operation range to the mid-infrared (MIR) band, as well as simplicity in the detector architecture, our work here presents a novel strategy for integrated photodetectors covering NIR to MIR at room temperature for the development of the future silicon photonic sensors with ultrawide spectral bandwidth. (c) 2022 Optica Publishing Group under the terms of the Optica Open Access Publishing Agreement English Optical Society of America High-sensitivity waveguide-integrated bolometer based on free-carrier absorption for Si photonic sensors Article 10.1364/OE.469862 1 Optics Express, v.30, no.23, pp.42663 - 42677 Optics Express 30 23 42663 42677 Y scie scopus 000901327200128 2-s2.0-85141525040 Optics Optics Article GRATING COUPLERS SILICON OPTIMIZATION DEVICES ELECTROREFRACTION ELECTROABSORPTION SPECTROSCOPY PREDICTIONS DETECTORS NOISE