Kang, Gumin 2024-01-19T10:38:45Z 2024-01-19T10:38:45Z 2022-02-28 2018-07 2166-8884 https://pubs.kist.re.kr/handle/201004/114359 Silicon nitride (Si3N4) has attracted numerous research interests in the field of photonic integrated circuit due to its CMOS compatibility, broad transparency window, and strong optical nonlinearity. We demonstrate high-Q Si3N4 micro-disk resonator for on-chip temperature sensing device. The micro-disk resonator exhibits Q-factor up to 3.0 x 10(4) in the near infrared region (938 nm). The spectral shift of WGM resonance as a function of temperature was monitored to calculate the sensitivity of device. English IEEE On-chip temperature sensor using high-Q Si3N4 micro-disk resonator Conference 1 23rd Opto-Electronics and Communications Conference (OECC) 23rd Opto-Electronics and Communications Conference (OECC) US Jeju, SOUTH KOREA 2018-07-02 23RD OPTO-ELECTRONICS AND COMMUNICATIONS CONFERENCE (OECC2018) 000477695500051 2-s2.0-85068011352