Kim, Hye Jin Kang, Dong-Hoon Lee, Eunji Hwang, Kyo Seon Shin, Hyun-Joon Kim, Jinsik Park, Jung Ho 2024-01-19T10:39:36Z 2024-01-19T10:39:36Z 2022-03-07 2018 0277-786X https://pubs.kist.re.kr/handle/201004/114383 We propose a simple fluorescent bio-chip based on two types of alternative current-dielectrophoretic (AC-DEP) force, attractive (positive DEP) and repulsive (negative DEP) force, for simultaneous nano-molecules analysis. Various radius of micro-holes on the bio-chip are designed to apply the different AC-DEP forces, and the nano-molecules are concentrated inside the micro-hole arrays according to the intensity of the DEP force. The bio-chip was fabricated by Micro Electro Mechanical system (MEMS) technique, and was composed of two layers; a SiO2 layer and Ta/Pt layer were accomplished for an insulation layer and a top electrode with micro-hole arrays to apply electric fields for DEP force, respectively. Each SiO2 and Ta/Pt layers were deposited by thermal oxidation and sputtering, and micro-hole arrays were fabricated with Inductively Coupled Plasma (ICP) etching process. For generation of each positive and negative DEP at micro-holes, we applied two types of sine-wave AC voltage with different frequency range alternately. The intensity of the DEP force was controlled by the radius of the micro-hole and size of nano-molecule, and calculated with COMSOL multi-physics. Three types of nano-molecules labelled with different fluorescent dye were used and the intensity of nano-molecules was examined by the fluorescent optical analysis after applying the DEP force. By analyzing the fluorescent intensities of the nano-molecules, we verify the various nano-molecules in analyte are located successfully inside corresponding micro-holes with different radius according to their size. English SPIE-INT SOC OPTICAL ENGINEERING Micro-hole array fluorescent sensor based on AC-Dielectrophoresis (DEP) for simultaneous analysis of nano-molecules Conference 10.1117/12.2291359 1 Conference on Advanced Biomedical and Clinical Diagnostic and Surgical Guidance Systems XVI, v.10484 Conference on Advanced Biomedical and Clinical Diagnostic and Surgical Guidance Systems XVI 10484 US San Francisco, CA 2018-01-28 ADVANCED BIOMEDICAL AND CLINICAL DIAGNOSTIC AND SURGICAL GUIDANCE SYSTEMS XVI 000453076100007 2-s2.0-85046792396 Proceedings Paper