Shin, Hyogeun Choi, Woongsun Yoon, Gun-Wook Cho, Il-Joo Choi, Nakwon Yoon, Jun-Bo Seo, Su Yeong 2024-01-19T10:39:50Z 2024-01-19T10:39:50Z 2022-02-28 2018-01 1084-6999 https://pubs.kist.re.kr/handle/201004/114396 This paper reports on a high-resolution lensless fluorescence imaging system using membrane deflection for reducing the gap between fluorescent samples and a CMOS image sensor array. The presented system applied the principle of the total internal reflection of excitation light inside a PDMS chip to minimize the exposure of excitation light to the image sensor. We integrated a very thin (5.5 mu m) PDMS membrane as a flexible deflector, which allowed for significant reduction of the gap (-20 mu m) inevitably created during the conventional packaging (i.e., wire bonding) of image sensors. In the fabricated system, we achieved minimum distance of 7.5 mu m between fluorescent samples and an image sensor array. This reduced gap almost directly corresponds to a resolution as high as 7.5 mu m, based on the point spread function (PSF). English IEEE A HIGH-RESOLUTION LENSLESS FLUORESCENCE IMAGING SYSTEM USING MEMBRANE DEFLECTION FOR REDUCING GAP BETWEEN SAMPLES AND IMAGE SENSOR Conference 1 31st IEEE International Conference on Micro Electro Mechanical Systems (MEMS), pp.419 - 421 31st IEEE International Conference on Micro Electro Mechanical Systems (MEMS) 419 421 US Belfast, NORTH IRELAND 2018-01-21 2018 IEEE MICRO ELECTRO MECHANICAL SYSTEMS (MEMS) 000434960900112 2-s2.0-85047005430