Lim, Weon Cheol Singh, Jitendra Pal Song, Jonghan Seong, Tae-Yeon Chae, Keun Hwa 2024-01-19T11:01:58Z 2024-01-19T11:01:58Z 2022-10-27 2022-10 2046-2069 https://pubs.kist.re.kr/handle/201004/114479 Herein, we systematically studied the effect of various excitation processes on the structural, optical, and magnetic properties of ZnO films implanted with 80 keV Ar+, 110 keV Mn+, and 190 keV Ag+ ions. Four different doses of 1 x 10(13), 1 x 10(14), 1 x 10(15), and 2 x 10(16) ions per cm(2) were used for implantation. It was observed that the structural, optical, and magnetic properties of the implanted samples were dominantly affected at the highest dose of 2 x 10(16) ions per cm(2). For lower doses, insignificant changes in these properties were observed. A comparison of various processes involved in the implantation process shows that both the electronic excitation and nuclear excitation processes are responsible for the changes in the structural, optical, and magnetic properties of the implanted ZnO films. English Royal Society of Chemistry Structural, optical, and magnetic properties of Ag+, Mn+ and Ar+ ions implanted ZnO thin films: effect of implantation dose and stopping energy Article 10.1039/d2ra05430b 1 RSC Advances, v.12, no.46, pp.29666 - 29676 RSC Advances 12 46 29666 29676 Y scie scopus 000869019200001 Chemistry, Multidisciplinary Chemistry Article RAY-ABSORPTION SPECTROSCOPY ROOM-TEMPERATURE FERROMAGNETISM DEPENDENCE PHOTOLUMINESCENCE SPINTRONICS ELECTRONICS GROWTH