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<dcvalue element="contributor" qualifier="author">Shim,&#x20;Jae-Phil</dcvalue>
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<dcvalue element="date" qualifier="accessioned">2024-01-19T11:07:06Z</dcvalue>
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<dcvalue element="title" qualifier="none">Heterogeneous&#x20;Integration&#x20;toward&#x20;Monolithic&#x20;3D&#x20;Chip</dcvalue>
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<dcvalue element="citation" qualifier="conferenceDate">2017-10-16</dcvalue>
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