Pham Due Cuong Yoon, Eui-Sung Tran Due Quy 2024-01-19T11:07:30Z 2024-01-19T11:07:30Z 2022-02-28 2017-07 2325-0925 https://pubs.kist.re.kr/handle/201004/114617 This paper presents an investigation on combined surface modifications and their effects to tribological properties of Si (100) flat surfaces. At first, micro-patterns were fabricated on Si wafers using photolithography and DRIE (Deep Reactive Ion Etching) fabrication techniques. The patterns include of pillars and channels shape in micro-scales. Secondly, the Si micro-patterns were coated by thin diamondlike carbon (DLC) or Perfluoropolyether (ZDOL) film, individually. The surfaces were then evaluated for the friction and wear properties at micro-scale. Results showed that the patterned surface exhibited reduced friction force compared to the Si flat surfaces, owing to reduced area of contact. Further, the combination of micro-patterns and tribology films such as DLC and ZDOL in this work is very effective in reducing frictional force and wear of the Si flat surface, and would be proved as a potential candidate for tribological applications in miniaturized devices like MEMS. English IEEE A Study on Surface Modification for Tribological Application in MEMS Conference 1 Annual International Conference on System Science and Engineering (ICSSE), pp.408 - 411 Annual International Conference on System Science and Engineering (ICSSE) 408 411 US Ho Chi Minh City, VIETNAM 2017-07-21 2017 INTERNATIONAL CONFERENCE ON SYSTEM SCIENCE AND ENGINEERING (ICSSE) 000427048400083 2-s2.0-85032351546