Lee, Kyung Woon Kim, Jinsik Park, Jung Ho Chae, Myung-Sic Hwang, Kyo Seon Lee, Dong-ho 2024-01-19T11:09:09Z 2024-01-19T11:09:09Z 2022-02-28 2017-01 0277-786X https://pubs.kist.re.kr/handle/201004/114683 We present the basic characteristics of amplitude modulation cantilever with optical waveguide in liquid. This optical waveguide cantilever-based transducer can be used for small particle detection or biological sensing in liquid environments. Essentially, the SiON waveguide embedded in the SiO2 cantilever is designed and fabricated to detect the biomolecular interaction or small particle in the liquid. For a measurement, the actuation based on amplitude modulation is applied for a stable oscillation of the cantilever in liquid environment. Finally, modulated output signal of optical waveguide cantilever were measured and analyzed. English SPIE-INT SOC OPTICAL ENGINEERING Characteristics of amplitude modulation cantilever sensor with optical waveguide in liquid Conference 10.1117/12.2251817 1 Conference on MOEMS and Miniaturized Systems XVI Conference on MOEMS and Miniaturized Systems XVI US San Francisco, CA 2017-01-30 MOEMS AND MINIATURIZED SYSTEMS XVI 000404905500023 2-s2.0-85020414176