Kang, JoonHyun Kuno, Yuki Ito, Kazuto Hayashi, Yusuke Arai, Shigehisa Han, Il-Ki Amemiya, Tomohiro Nishiyama, Nobuhiko Suzuki, Junichi 2024-01-19T11:37:18Z 2024-01-19T11:37:18Z 2022-03-01 2016-07 https://pubs.kist.re.kr/handle/201004/114946 A monolithically fabricated apodized a-Si: H grating coupler with metal mirror was demonstrated The minimum groove length for the apodized grating was more than 100 nm and measured coupling efficiency was 70%. English IEEE Highly efficient circular holes added a-Si: H grating coupler with metal mirror for 3D optical interconnects Conference 1 21st International Optoelectronics and Communications Conference (OECC) / International Conference on Photonics in Switching (PS) 21st International Optoelectronics and Communications Conference (OECC) / International Conference on Photonics in Switching (PS) US Niigata, JAPAN 2016-07-03 2016 21ST OPTOELECTRONICS AND COMMUNICATIONS CONFERENCE (OECC) HELD JOINTLY WITH 2016 INTERNATIONAL CONFERENCE ON PHOTONICS IN SWITCHING (PS) 000392308800220