Park, Jaeho Lee, Kyungwoo Lee, Jaehong Hwang, Hae Won Jeong, Goeen Kim, Kyung Yeun Kim, Yu-Chan Ok, Myoung-Ryul Han, Hyung-Seop Sun, Jeong-Yun Jeon, Hojeong 2024-01-19T12:00:34Z 2024-01-19T12:00:34Z 2022-07-08 2022-06 https://pubs.kist.re.kr/handle/201004/115113 In the semiconductor manufacturing process, the inner walls of the equipment are coated with yttrium-based oxides for etch resistance against plasma exposure. Yttrium oxyfluoride (YOF) particle synthesis and coating methods have been actively studied owing to their high erosion resistance compared to Y2O3 and Al2O3. Owing to the formation of a rough and porous coating layer by thermal spray-coating, the coating layer disintegrates, as the etching process has been conducted for a long time. Laser-induced synthesis and coating technology offer several advantages, including simplified process steps, ease of handling, and formation of a dense coating layer on the target material. In this study, YOF was coated on an aluminum substrate using a modified precursor solution. The NaF and HMTA were added to the precursor solution, resulting in enhanced synthetic reactivity and stabilizing the oxides. The material coated on the surface was analyzed based on the characteristics of composition, chemical bonding, and phase identification. We found that the coating properties can be improved by using an appropriate combination of modified precursor solutions and laser parameters. Therefore, the findings in this study are expected to be utilized in the field of coating technology. English MDPI AG Improvement of Yttrium Oxyfluoride Coating with Modified Precursor Solution for Laser-Induced Hydrothermal Synthesis Article 10.3390/coatings12060740 1 Coatings, v.12, no.6 Coatings 12 6 Y scie scopus 000818424600001 Materials Science, Multidisciplinary Materials Science, Coatings & Films Physics, Applied Materials Science Physics Article LUMINESCENCE MECHANISMS LAYER TB Y2O3 yttrium oxyfluoride (YOF) laser-induced hydrothermal reaction laser-induced single-step coating