Lee, Byeungleul Jeong, Jinwoo Cho, Chanseob Kim, Jinseok Kim, Bonghwan Kim, Hyeon Cheol Chun, Kukjin 2024-01-19T12:09:45Z 2024-01-19T12:09:45Z 2022-03-07 2013 https://pubs.kist.re.kr/handle/201004/115433 We developed a cantilever-arrayed blood pressure sensor array fabricated by (111) silicon bulk-micromachining for the noninvasive and continuous measurement of blood pressure. The blood pressure sensor measures the blood pressure based on the change in resistance of the piezoresistor on a 5-mu m-thick-arrayed perforated membrane and 20-mu m-thick metal pads. The length and width of the unit membrane are 210 and 310 mu m, respectively. The width of the insensible zone between adjacent units is only 10 mu m. The resistance change over contact force was measured to verify the performance. The good linearity of the result confirmed that the PDMS package transfers the forces appropriately. The measured sensitivity was about 4.5%/N. The maximum measurement range and resolution of the fabricated blood pressure sensor were greater than 900 mmHg and less than 1 mmHg, respectively. English IEEE Cantilever Arrayed Blood Pressure Sensor for Arterial Applanation Tonometry Conference 1 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS), pp.907 - 910 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) 907 910 US Suzhou, PEOPLES R CHINA 2013-04-07 2013 8TH ANNUAL IEEE INTERNATIONAL CONFERENCE ON NANO/MICRO ENGINEERED AND MOLECULAR SYSTEMS (IEEE NEMS 2013) 000327183000193 2-s2.0-84883120979 Proceedings Paper