Hwang, Tae-Yeon Lee, Junghyun Jeon, Seung-Woo Kim, Yong-Su Cho, Young-Wook Lim, Hyang-Tag Moon, Sung Han, Sang-Wook Choa, Yong-Ho Jung, Hojoong 2024-01-19T12:33:27Z 2024-01-19T12:33:27Z 2022-05-04 2022-02 1530-6984 https://pubs.kist.re.kr/handle/201004/115640 Engineering a strongly interacting uniform qubit cluster would be a major step toward realizing a scalable quantum system for quantum sensing and a node-based qubit register. For a solid-state system that uses a defect as a qubit, various methods to precisely position defects have been developed, yet the large-scale fabrication of qubits within the strong coupling regime at room temperature continues to be a challenge. In this work, we generate nitrogen vacancy (NV) color centers in diamond with sub-10 nm scale precision using a combination of nanoscale aperture arrays (NAAs) with a high aspect ratio of 10 and a secondary E-beam hole pattern used as an ion-blocking mask. We perform optical and spin measurements on a cluster of NV spins and statistically investigate the effect of the NAAs during an ion-implantation process. We discuss how this technique is effective for constructing a scalable system. English American Chemical Society Sub-10 nm Precision Engineering of Solid-State Defects via Nanoscale Aperture Array Mask Article 10.1021/acs.nanolett.1c04699 1 Nano Letters, v.22, no.4, pp.1672 - 1679 Nano Letters 22 4 1672 1679 N scie scopus 000776700100029 2-s2.0-85124896763 Chemistry, Multidisciplinary Chemistry, Physical Nanoscience & Nanotechnology Materials Science, Multidisciplinary Physics, Applied Physics, Condensed Matter Chemistry Science & Technology - Other Topics Materials Science Physics Article ELECTRONIC SPINS SINGLE Nanoscale aperture array Mask ion implantation NV center Scalable qubit system