Matkivskyi, V. Lee, Y. Seo, H.S. Lee, D.-K. Park, J.-K. Kim, I. 2024-01-19T13:04:14Z 2024-01-19T13:04:14Z 2022-01-10 2021-12 1567-1739 https://pubs.kist.re.kr/handle/201004/116002 This work is dedicated to the study of electronic-beam (e-beam) evaporated titanium oxide (TiOx) contact for polycrystalline silicon hetero-junction solar cells. A TiOx material obtained by e-beam evaporation method is suggested as a possible alternative to the atomic layer deposition (ALD) process. The purpose is to achieve corresponding passivation efficiency between e-beam evaporation of TiOx and the ALD method. However, the TiOx in question achieved a relatively low passivation performance of Seff = 113 cm？1 in comparison to the reported ALD results. Nonetheless, as e-beam evaporation is well-established and an environmentally friendly deposition technology, e-beam evaporated TiOx passivation layer has potential for improvement. What is clearly demonstrated in our work is how such an improvement in contact resistance dropped from >55 Ω/cm2 to 2.29 Ω/cm2. Indeed, our study established a correlation between the main process parameters of e-beam evaporation and their influence on the quality of electron selective TiOx layer. Moreover, we reveal a possible scenario for the implementation of e-beam evaporated Titanium oxide as electron selective contact for asymmetrical hetero-junction solar cells. ？ 2021 The Authors English Elsevier Electronic-beam evaporation processed titanium oxide as an electron selective contact for silicon solar cells Article 10.1016/j.cap.2021.10.005 1 Current Applied Physics, v.32, pp.98 - 105 Current Applied Physics 32 98 105 N scie scopus kci ART002788721 000744240800003 2-s2.0-85118253536 Materials Science, Multidisciplinary Physics, Applied Materials Science Physics Article Atomic layer deposition Evaporation Silicon solar cells Titanium dioxide Atomic-layer deposition Beam evaporation Carrier selective contact Deposition methods Deposition process Electronic beams Evaporation method Oxide materials Selective contacts Titania oxides Passivation Carrier selective contacts e-beam Passivation Solar cells TiO2