Park, Jong-Keuk Chung, Yong-Hwa Kim, Young-Do Baik, Young-Joon 2024-01-19T13:38:18Z 2024-01-19T13:38:18Z 2022-03-07 2007 1012-0394 https://pubs.kist.re.kr/handle/201004/116389 Al-Cr-N coatings were deposited on Si substrate by unbalanced magnetron (UBM) sputtering with Al and Cr targets and Ar and N-2 reactive gases at substrate bias of -50V. At a fixed chamber pressure of 0.8 Pa, the microstructure of the coatings was changed from AlN/CrN nanoscale multilayered structure to (Al,Cr)N mixed single layered one with the increase of rotation speed of substrate holder. The residual compressive stress of AlN/CrN nanoscale multilayered coating was higher than that of (Al,Cr)N single layered coating. For the AlN/CrN nanoscale multilayered coating, the residual compressive stress was reduced with increase in total pressure of reactive gases. The AlN/CrN nanoscale multilayered coatings with higher residual compressive stress showed higher hardness and wear resistance. English TRANS TECH PUBLICATIONS LTD Effect of nanoscale multilayered structurization on hardness and wear resistance in Al-Cr-N coating Conference 10.4028/www.scientific.net/SSP.124-126.1305 1 IUMRS International Conference in Asia, v.124-126, pp.1305 - + IUMRS International Conference in Asia 124-126 1305 + SZ Cheju Isl, SOUTH KOREA 2006-09-10 ADVANCES IN NANOMATERIALS AND PROCESSING, PTS 1 AND 2 000245890100325 2-s2.0-38549150491 Proceedings Paper