Song, Jin O. Shim, Heung Taek Byun, Dong Jin Lee, Joong Kee 2024-01-19T13:38:56Z 2024-01-19T13:38:56Z 2022-03-07 2007 1012-0394 https://pubs.kist.re.kr/handle/201004/116430 Effects of substrate temperature and phosphor doping on electrochemical characteristics of the silicon film anode were investigated. The silicon thin films were synthesized directly on copper foil by radio-frequency capacitively coupled plasma-enhanced chemical-vapor deposition (r.f.-CVD). The cyclability of the silicon anode greatly depends on the surface morphology and surface resistivity. The silicon film anodes which have granular structure and high conductivity showed higher cyclability than those of planer and low conductivity, respectively. English TRANS TECH PUBLICATIONS LTD A study on the effect of structure and P-doping of Si thin film as an anode for lithium rechargeable batteries Conference 10.4028/www.scientific.net/SSP.124-126.1063 1 IUMRS International Conference in Asia, v.124-126, pp.1063 - + IUMRS International Conference in Asia 124-126 1063 + SZ Cheju Isl, SOUTH KOREA 2006-09-10 ADVANCES IN NANOMATERIALS AND PROCESSING, PTS 1 AND 2 000245890100265 2-s2.0-38549107243 Proceedings Paper