Kim, W. Park, S. Gwon, Y. Kim, H.N. Kim, J. 2024-01-19T14:02:01Z 2024-01-19T14:02:01Z 2021-09-02 2021-09 0167-577X https://pubs.kist.re.kr/handle/201004/116570 Polydimethylsiloxane (PDMS) has been widely used as a mold material to fabricate multiscale patterns, owing to its cost-effectiveness, flexibility, and optical transparency. However, it is important to analyze and understand the deformation of nanoscale patterns due to mechanical and thermal inputs during the replication step. Here, we present an analysis of nanoscale deformation of PDMS molds in response to heat and pressure during the repetitive molding process of thermoplastic polymers. The width and height of the nano-sized ridges of PDMS molds decreased as the number of replications of thermoplastic polymers increased. The decoupling experiments showed that the heat and pressure induced considerable deformation of the width and height of nano-sized ridges of PDMS molds. Using the precisely controlled deformation of nanostructures in PDMS molds, we demonstrated that nanostructures of different sizes can be fabricated on representative thermoplastic and UV-curable polymers consistently. ？ 2021 Elsevier B.V. English Elsevier B.V. Heat and pressure-assisted soft lithography for size-tunable nanoscale structures Article 10.1016/j.matlet.2021.130064 1 Materials Letters, v.299 Materials Letters 299 N scie scopus 000664033000017 2-s2.0-85106601449 Materials Science, Multidisciplinary Physics, Applied Materials Science Physics Article Cost effectiveness Curing Microchannels Molds Nanostructures Polydimethylsiloxane Reinforced plastics Silicones Mold materials Nano sized Nano-scale deformation Nano-scale patterns Nanoscale structure Optical transparency Size tunable Soft-lithography Thermoplastic polymer UV curable polymer Deformation Mold Nanoscale deformation Polydimethylsiloxane Thermoplastic polymer UV-curable polymer