Lee, Hye Jin Wang, Dasom Kim, Tae Hyeong Jung, Dae-Han Kil, Tae-Hyeon Lee, Ki-Suk Choi, Hyung-Jin Baek, Seung-Hyub Yoon, Euijoon Choi, Won Jun Baik, Jeong Min 2024-01-19T14:33:59Z 2024-01-19T14:33:59Z 2021-09-05 2021-05-01 0169-4332 https://pubs.kist.re.kr/handle/201004/117009 A strategy for a microbolometer operating over a wide range of temperatures up to 100 degrees C with low nonlinearity and without hysteresis is described, based on a thermally stable VO2(B) film and 5-stack Ti/MgF2 infrared (IR) absorbers. The highly crystalline VO2(B) film formed on an amorphous SrTiO3 layer shows a high temperature co-efficient of resistivity and low resistivity without any significant changes up to 100 degrees C. No significant changes are observed in the two values even after keeping the film at 100 degrees C for over a month. This outstanding thermostability makes the microbolometers with and without the IR absorber easily capable of operating up to 100 degrees C. The microbolometers with the 5-stack Ti/MgF2 IR absorber also shows increases in its responsivity by 4 times at 20 degrees C and by 3 times at 100 degrees C compared to that without IR absorber due to the increase of IR absorption. These results are achieved without significant increase in the thermal time constants even with the introduction of thermally massive IR absorber. English ELSEVIER Wide-temperature (up to 100 degrees C) operation of thermostable vanadium oxide based microbolometers with Ti/MgF2 infrared absorbing layer for long wavelength infrared (LWIR) detection Article 10.1016/j.apsusc.2021.149142 1 APPLIED SURFACE SCIENCE, v.547 APPLIED SURFACE SCIENCE 547 scie scopus 000634529300006 2-s2.0-85100610550 Chemistry, Physical Materials Science, Coatings & Films Physics, Applied Physics, Condensed Matter Chemistry Materials Science Physics Article THIN-FILMS ROOM-TEMPERATURE GROWTH ABSORPTION DESIGN VO2 METAMATERIAL EFFICIENT DENSITY XPS Microbolometer High-temperature operation VO2(B) Ti/MgF2 infrared absorber High responsivity and good detectivity