Park, JY Kim, KT Moon, S Pak, JJ 2024-01-19T15:09:59Z 2024-01-19T15:09:59Z 2022-03-07 2003 https://pubs.kist.re.kr/handle/201004/117353 This paper describes the novel UV-Lithography technique for fabrication of 3D feed horn mold structure array using implementation of mirror reflected parallel beam illuminator (MRPBI) system, fabrication of 3D feed horn MEMS antenna's plate using plastic micromachining (PMM) by Polydimethylsiloxane (PDMS) and the 3D MEMS antenna array are assembled using novel 3D MEMS bonding technique by mesh structure bonding (MSB) method. English IEEE 3D MEMS antenna for IR sensor using novel UV-lithography, plastic micro machining and mesh structure bonding technique Conference 10.1109/OMEMS.2003.1233476 1 IEEE/LEOS International Conference on Optical MEMS, pp.79 - 80 IEEE/LEOS International Conference on Optical MEMS 79 80 US WAIKOLOA, HI 2003-08-18 2003 IEEE/LEOS INTERNATIONAL CONFERENCE ON OPTICAL MEMS 000185581900038 2-s2.0-84946219454 Proceedings Paper