Kil, Tae-Hyeon Choi, Hyung-Jin Lee, Gwangyeob Lee, Byeong hyeon Jung, Soo Young Ning, Ruiguang Park, Chan Won, Sung Ok Chang, Hye Jung Choi, Won Jun Baek, Seung-Hyub 2024-01-19T16:02:33Z 2024-01-19T16:02:33Z 2021-09-02 2020-12 0955-2219 https://pubs.kist.re.kr/handle/201004/117778 Vanadium oxides exhibit a broad spectrum of physical properties due to their ability to form various compounds and polymorphs. To utilise a particular property, it is essential to selectively synthesise a desired phase. Herein, we demonstrate a method to selectively and reproducibly grow (00l)-textured VO2(B) thin films using an amorphous SrTiO3 buffer layer by sputtering at 350 degrees C, which enables their direct integration with read-outintegrated-circuits (ROICs), glass, and polymer substrates. The VO2(B) films exhibit high temperature-coefficient-of-resistances (TCRs) ( -3.5%/K at 25 degrees C and >-1.5%/K at 95 degrees C) and low electrical resistivities (similar to 5 10(-1) Omega cm at 25 degrees C and < 1 x 10(-1) Omega cm at 95 degrees C), which are favourable for realising highly-sensitive, lownoise, and high-temperature microbolometers. A robust thermal stability of these VO2(B) thin films at ambient pressure will provide new opportunities to incorporate thermal sensing functions to various electronics. English ELSEVIER SCI LTD Selective growth and texturing of VO2(B) thin films for high-temperature microbolometers Article 10.1016/j.jeurceramsoc.2020.05.052 1 JOURNAL OF THE EUROPEAN CERAMIC SOCIETY, v.40, no.15, pp.5582 - 5588 JOURNAL OF THE EUROPEAN CERAMIC SOCIETY 40 15 5582 5588 N scie scopus 000564251700004 2-s2.0-85087179106 Materials Science, Ceramics Materials Science Article OXIDE PERFORMANCE FABRICATION Vanadium oxide Polymorphic Texture Phase selection High-temperature bolometer