Park, YJ Cho, YS Koh, EK Kim, EK Kim, GG Byun, DJ Min, SK 2024-01-19T16:08:56Z 2024-01-19T16:08:56Z 2022-03-07 2001 https://pubs.kist.re.kr/handle/201004/117915 English JAPAN SOCIETY APPLIED PHYSICS Implantation of N-ion on sapphire substrate for GaN epilayer Conference 1 International Microprocesses and Nanotechnology Conference, pp.222 - 223 International Microprocesses and Nanotechnology Conference 222 223 JA KUNIBIKI MESSE, JAPAN 2001-10-31 MICROPROCESSES AND NANOTECHNOLOGY 2001, DIGEST OF PAPERS 000175849600111 2-s2.0-84960437438 Proceedings Paper