Lee, Youngseok Woo, Yeeun Lee, Doh-Kwon Kim, Inho 2024-01-19T16:33:28Z 2024-01-19T16:33:28Z 2021-09-02 2020-09-15 0038-092X https://pubs.kist.re.kr/handle/201004/118121 Optimally designed Si nanostructures can serve as effective light trapping structures for flexible crystalline ultrathin Si solar cells. In this study, we develop a unique quasi-hexagonal inverted nano-pyramid in a hexagonal array, fabricated by a combined process of nanosphere lithography and wet etching. Self-assembled silica nanoparticles were deposited on Si wafers by spin coating, followed by deposition of triangular metal nanodisks in a hexagonal array. The metal nanodisks were used as a wet etch mask in an alkaline solution to create the quasi-hexagonal Si nanostructures. We investigated a temporal evolution of the Si nanostructures with increasing the etch time to optimize optical performances. The newly developed nanostructures take a quasi-hexagonal inverted pyramid, which provides geometrically high compatibility with the self-assembled monolayers in a hexagonal array. We incorporated these quasi-hexagonal nanostructures to the flexible crystalline ultrathin Si solar cells, and the novel nanostructures exhibited optical performances comparable to conventional micro-pyramid textures while showing the enhanced mechanical flexibility of the ultrathin Si-based solar cells. English PERGAMON-ELSEVIER SCIENCE LTD ELECTRON-BEAM LITHOGRAPHY NANOSPHERE LITHOGRAPHY NANOIMPRINT LITHOGRAPHY SILICON ARRAYS NANOFABRICATION SI(100) Fabrication of quasi-hexagonal Si nanostructures and its application for flexible crystalline ultrathin Si solar cells Article 10.1016/j.solener.2020.08.063 1 SOLAR ENERGY, v.208, pp.957 - 965 SOLAR ENERGY 208 957 965 scie scopus 000572920000005 2-s2.0-85090279082 Energy & Fuels Energy & Fuels Article ELECTRON-BEAM LITHOGRAPHY NANOSPHERE LITHOGRAPHY NANOIMPRINT LITHOGRAPHY SILICON ARRAYS NANOFABRICATION SI(100) Nanosphere lithography Quasi-hexagonal nanostructures Light trapping Ultrathin Si solar cell