Chaudhary, Surekha Saraswat, Himani Devi, Devarani Kulriya, Pawan Singh, Fouran Won, Sung-Ok Shin, Hyun-Joon Parkash, Jai Sharma, Aditya 2024-01-19T16:34:39Z 2024-01-19T16:34:39Z 2021-09-02 2020-09 0042-207X https://pubs.kist.re.kr/handle/201004/118189 SnO2 thin films have been deposited on Si substrates using RF-magnetron sputtering and implanted by 200 keV Cu- ions with ion fluence of 2.79 x 10(16) ion/cm(2) and 4 x 10(16) ion/cm(2). Post annealing is done on the pristine and Cu- ion-implanted SnO2 thin films. Samples were characterized using the grazing-incidence X-ray diffraction (GIXRD), field-emission scanning electron microscopy (FESEM) and near-edge X-ray absorption fine structure (NEXAFS). After the annealing, amorphous to crystalline phase transition and growth of particles are seen. It is also evidenced that Cu ions do not make metallic/oxide phases up to the implantation dose of 2.79 x 10(16) ion/cm(2). Cu L-edge NEXAFS has confirmed the Cu2+ ions in the samples. The O K-edge NEXAFS spectra of annealed films have shown diminished peak intensity of O 2p to Sn 5s hybridized orbitals which signify the O vacancy formation. A pre-edge peak in the O K-edge NEXAFS of Cu implanted films has evolved and confirms the additional hybridization of unoccupied Cu d orbitals with O 2p orbitals. The improved intensity of Sn M-5,M-4-edge features is due to the enhanced crystallinity in annealed samples. Ion-solid interaction induced structural and electronic structure amendments are briefly discussed in the light of energy-loss mechanism. English PERGAMON-ELSEVIER SCIENCE LTD RAY-ABSORPTION SPECTROSCOPY MAGNETIC-PROPERTIES NANOPARTICLES SURFACE XANES CRYSTALLINE PERFORMANCE ZNO Structural and electronic-structure investigations of defects in Cu-ion-implanted SnO2 thin films Article 10.1016/j.vacuum.2020.109481 1 VACUUM, v.179 VACUUM 179 scie scopus 000557782200014 2-s2.0-85086077225 Materials Science, Multidisciplinary Physics, Applied Materials Science Physics Article RAY-ABSORPTION SPECTROSCOPY MAGNETIC-PROPERTIES NANOPARTICLES SURFACE XANES CRYSTALLINE PERFORMANCE ZNO Thin films XRD NEXAFS SnO2