Sim, T Moon, S Hwang, SW Chae, K Oh, M 2024-01-19T16:38:54Z 2024-01-19T16:38:54Z 2022-03-07 2000 0277-786X https://pubs.kist.re.kr/handle/201004/118207 Although the 3D antenna coupled structure type Bolometer has many advantages, the challenge for fabricating 3D antenna coupled structure could not be carried out due to the difficulty of fabrication. The purpose of this paper is to propose-the new 3D antenna coupled bolometer structure and to find a possibility of fabricating 3D antenna structure. We propose to use horn antenna because it is well known that the horn antenna has the best efficiency in the upper range of radio frequency. Since lengthening the height of horn when the aperture size of horn is fixed enhances the efficiency of the horn antenna, The difficulty of fabrication of 3D antenna is on the horn shape fabrication itself In this study, we focus on the verification of the probability of fabricating a micro horn shape and propose to use SU-S to fabricate a high horn shape in this paper. Because The UV is a light, when the lithography process is done, the UV disperses and refracts from the edge of mask patterns. We utilize this property of UV to make a horn shape. At first we experimented to set up a standard process condition. The acquired standard conditions are the data ranged from 10 to 275 mum in thickness. Fixing standard condition for the 20 and 100 mum thickness except dose, we changed UV dose condition from 84 mJ/cm(2) to 3000 mJ/cm(3)(for UV intensity is 8.4 mW/cm(2) and wave length is 356nm), and checked the side wall profile of the test pattern structures by SEM(Scanning Electron Microscope). They had sloped side-wall profiles and showed the possibility of fabricating horn shape antenna array using SU-8. Consequently it seems to be possible to fabricate the horn antenna array coupled with bolometers. English SPIE-INT SOC OPTICAL ENGINEERING Fabrication of horn shape antenna array using SU-8 & application to the bolometer Conference 10.1117/12.396470 1 Conference on Micromachining and Microfabrication Process Technology VI, v.4174, pp.496 - 507 Conference on Micromachining and Microfabrication Process Technology VI 4174 496 507 US SANTA CLARA, CA 2000-09-18 MICROMACHINING AND MICROFABRICATION PROCESS TECHNOLOGY VI 000165734900055 2-s2.0-0034547224 Proceedings Paper