So, Byeongchan Cheon, Changheon Lee, Joohyoung Lee, Junchae Kwak, Taemyung Choi, Uiho Song, JinDong Chang, Joonyeon Nam, Okhyun 2024-01-19T17:00:42Z 2024-01-19T17:00:42Z 2021-09-02 2020-08-31 0040-6090 https://pubs.kist.re.kr/handle/201004/118238 English ELSEVIER SCIENCE SA CRACK-FREE THICK ALN SAPPHIRE FILMS Epitaxial growth of deep ultraviolet light emitting diodes with two-step n-AlGaN layer Article 10.1016/j.tsf.2020.138103 1 THIN SOLID FILMS, v.708 THIN SOLID FILMS 708 scie scopus 000541381000002 2-s2.0-85085506837 Materials Science, Multidisciplinary Materials Science, Coatings & Films Physics, Applied Physics, Condensed Matter Materials Science Physics Article CRACK-FREE THICK ALN SAPPHIRE FILMS Deep ultraviolet light emitting diodes Epitaxial growth High temperature metal organic chemical vapor deposition n-Aluminum gallium nitride layer Two-step deposition