Kim, Su-Kyung Cho, Jin-Woo Im, Hyeong-Seop Lim, Weon-Cheol Kim, Sun-Kyung Seong, Tae-Yeon 2024-01-19T17:01:16Z 2024-01-19T17:01:16Z 2021-09-05 2020-08-01 0272-8842 https://pubs.kist.re.kr/handle/201004/118271 Sputter-deposited SrVOx was employed to create transparent conducing SrVOx/Ag/SrVOx films and their optical-electrical properties were examined as functions of SrVOx and Ag thicknesses. With the increase in the thickness of SrVOx films from 15 to 45 nm in the SrVOx/Ag/SrVOx films, the carrier concentration, sheet resistance, and electron mobility were in the range of 2.0 x 10(22) - 1.03 x 10(22) cm(-3), 3.15 -2.76 Omega/sq., and 21.99 -19.76 cm(2)/Vs, respectively. The 25 nm-thick SrVOx-based multilayer gave the highest average transmittance (T-av) of 91.5%. The 25 nm-thick SrVOx-based multilayer gave the largest Haacke's figure of merit (FOM) of 144.5 x 10(-3) Omega(-1). With increasing Ag layer thickness from 9 to 21 nm, the carrier concentration, mobility and sheet resistance of the multilayers were in the range of 1.05 x 10(22) - 1.99 x 10(22) cm(-3), 15.56 -22.46 cm(2)/Vs, and 1.97 - 6.48 Omega/sq., respectively. The T-av of the SrVOx (25 nm)/Ag/SrVOx (25 nm) multilayer gradually decreased from 95.5 to 82.6% with the Ag layer thickness. The rigorous coupled-wave (RCW) simulations were performed to describe the wavelength-dependent transmittance characteristics of the SrVOx (25 nm)/Ag (15 nm)/SrVOx (25 nm) samples. Based on the phasor examination, the effect of the SrVOx film thickness on the transmittance characteristics of the multilayers is described and discussed. English ELSEVIER SCI LTD INDIUM-TIN-OXIDE OPTICAL-PROPERTIES THIN-FILMS MULTILAYER FILMS TRANSMITTANCE Formation of high ultraviolet transparent SrVOx/Ag-based conducting electrode Article 10.1016/j.ceramint.2020.04.300 1 CERAMICS INTERNATIONAL, v.46, no.11, pp.19484 - 19490 CERAMICS INTERNATIONAL 46 11 19484 19490 scie scopus 000537564300128 2-s2.0-85088363947 Materials Science, Ceramics Materials Science Article INDIUM-TIN-OXIDE OPTICAL-PROPERTIES THIN-FILMS MULTILAYER FILMS TRANSMITTANCE SrVOx Ag layer Transparent conducting electrode Ultraviolet transparency Oxide/metal/oxide multilayer Phasor analysis