Kim, Hong-Kyu Ha, Heon-Young Bae, Jee Hwan Cho, Min Kyung Kim, Juyoung Han, Jeongwoo Suh, Jin-Yoo Kim, Gyeung-Ho Lee, Tae-Ho Jang, Jae Hoon Chun, Dongwon 2024-01-19T17:02:27Z 2024-01-19T17:02:27Z 2021-09-02 2020-08 2045-2322 https://pubs.kist.re.kr/handle/201004/118341 Light element identification is necessary in materials research to obtain detailed insight into various material properties. However, reported techniques, such as scanning transmission electron microscopy (STEM)-energy dispersive X-ray spectroscopy (EDS) have inadequate detection limits, which impairs identification. In this study, we achieved light element identification with nanoscale spatial resolution in a multi-component metal alloy through unsupervised machine learning algorithms of singular value decomposition (SVD) and independent component analysis (ICA). Improvement of the signal-to-noise ratio (SNR) in the STEM-EDS spectrum images was achieved by combining SVD and ICA, leading to the identification of a nanoscale N-depleted region that was not observed in as-measured STEM-EDS. Additionally, the formation of the nanoscale N-depleted region was validated using STEM-electron energy loss spectroscopy and multicomponent diffusional transformation simulation. The enhancement of SNR in STEM-EDS spectrum images by machine learning algorithms can provide an efficient, economical chemical analysis method to identify light elements at the nanoscale. English Nature Publishing Group Nanoscale light element identification using machine learning aided STEM-EDS Article 10.1038/s41598-020-70674-y 1 Scientific Reports, v.10, no.1 Scientific Reports 10 1 Y scie scopus 000563546400031 2-s2.0-85089419968 Multidisciplinary Sciences Science & Technology - Other Topics Article AUSTENITIC STAINLESS-STEELS ATOM-PROBE TOMOGRAPHY INDEPENDENT COMPONENT ANALYSIS AGING PRECIPITATION BEHAVIOR HIGH-NITROGEN MECHANICAL-PROPERTIES DISCONTINUOUS PRECIPITATION RESOLUTION CORROSION CR2N