Lim, Keun Yong Kim, Dong Uk Kong, Jun Ho Choi, Byung-Il Seo, Won-Seon Yu, Jae-Woong Choi, Won Kook 2024-01-19T17:03:11Z 2024-01-19T17:03:11Z 2021-08-31 2020-07-15 1944-8244 https://pubs.kist.re.kr/handle/201004/118382 Organic electronic devices such as organic light-emitting diodes (OLEDs), quantum dot LEDs, and organic photovoltaics are promising technologies for future electronics. However, achieving long-term stability of organic-based optoelectronic devices has been regarded as a crucial problem to be solved. In this work, a simple and reproducible fabrication method for ultralow water permeation barrier films having a triple-layered (triad) hydrogenated silicon nitride (a-SiNx:H)/nanosilicon oxynitride (n-SiOxNy)/hybrid silicon oxide (h-SiOx) multistructure is presented. Two triad (a-SiNx:H/n-SiOxNy/h-SiOx)(n=2) multistructure barrier films are deposited on both sides of a poly(ethylene terephthalate) substrate using a combination of low-pressure plasma-enhanced chemical vapor deposition and dip coating. The deposited films show a high average transmittance (400-700 nm) of 84% and an ultralow water vapor transmission rate of 2 x 10-6 g/m(2)/day. In the electroluminescence characteristics of OLEDs encapsulated with two triad barrier films, the operational lifetime (T-50) of OLEDs is 1584 h, which is almost similar to that (1416 h) of OLEDs encapsulated with a glass lid. English American Chemical Society ATOMIC LAYER DEPOSITION DEGRADATION MECHANISMS FUNCTIONAL DESIGN ENCAPSULATION PERFORMANCE HYDROGEN NITROGEN TRANSPARENT ALUMINUM CELLS Ultralow Water Permeation Barrier Films of Triad a-SiNx:H/n-SiOxNy/h-SiOx Structure for Organic Light-Emitting Diodes Article 10.1021/acsami.0c05858 1 ACS Applied Materials & Interfaces, v.12, no.28, pp.32106 - 32118 ACS Applied Materials & Interfaces 12 28 32106 32118 scie scopus 000551488400107 2-s2.0-85088157415 Nanoscience & Nanotechnology Materials Science, Multidisciplinary Science & Technology - Other Topics Materials Science Article ATOMIC LAYER DEPOSITION DEGRADATION MECHANISMS FUNCTIONAL DESIGN ENCAPSULATION PERFORMANCE HYDROGEN NITROGEN TRANSPARENT ALUMINUM CELLS a-SiNx:H/n-SiOxNy/h-SiOx ultralow water permeation barrier film water vapor transmission rate (WVTR) organic light-emitting diodes (OLEDs) lifetime