Lee, HyunSeok Lim, Keun Yong Kim, Kwang-Bum Yu, Jae-Woong Choi, Won Kook Choi, Ji-Won 2024-01-19T18:01:45Z 2024-01-19T18:01:45Z 2021-09-04 2020-03-11 1944-8244 https://pubs.kist.re.kr/handle/201004/118858 All-solid-state thin-film batteries have been actively investigated as a power source for various microdevices. However, insufficient research has been conducted on thin-film encapsulation, which is an essential element of these batteries as solid electrolytes and Li anodes are vulnerable to moisture in the atmosphere. In this study, a hybrid thin-film encapsulation structure of hybrid SiOy/SiNxOy/a-SiNx:H/Parylene is suggested and investigated. The water-vapor transmission rate of hybrid thin-film encapsulation is estimated to be 4.9 x 10 (-3) g m(-2).day(-1), a value that is applicable to batteries as well as flexible solar cells, thin-film transistor liquid-crystal display, and E-papers. As a result of hybrid thin-film encapsulation, it is confirmed that the all-solid-state thin-film batteries are stable even after 100 charge/discharge cycles in the air atmosphere for 30 days and present a Coulombic efficiency of 99.8% even after 100 cycles in the air atmosphere. These results demonstrate that the thin-film encapsulation structure of hybrid SiOy/SiNxOy/a-SiNx:H/Parylene can be employed in thin-film batteries while retaining long-term stability. English American Chemical Society SCALABLE FABRICATION LITHIUM Hybrid Thin-Film Encapsulation for All-Solid-State Thin-Film Batteries Article 10.1021/acsami.9b20471 1 ACS Applied Materials & Interfaces, v.12, no.10, pp.11504 - 11510 ACS Applied Materials & Interfaces 12 10 11504 11510 scie scopus 000526609100019 2-s2.0-85081944088 Nanoscience & Nanotechnology Materials Science, Multidisciplinary Science & Technology - Other Topics Materials Science Article SCALABLE FABRICATION LITHIUM thin-film batteries micro batteries thin-film encapsulation silicon oxynitride parylene