Park, Jinseon Yoon, Hong Rho Khan, M. Alam Cho, Sangho Sung, Myung Mo 2024-01-19T18:03:18Z 2024-01-19T18:03:18Z 2021-09-05 2020-02-19 1944-8244 https://pubs.kist.re.kr/handle/201004/118946 The infiltration depth and water vapor transmission rate (WVTR) were explored in a variety of Al2O3-polymer hybrid layers as thin gas barrier films by filling the free volumes of polymers in the subsurface region with Al2O3 using the atomic layer infiltration (ALI) method. Among all, the prepared Al2O3 - polyethylene terephthalate (PET), Al2O3-polyimide, and Al2O3-Nylon 6 hybrid thin layers with the infiltration depth in the nanometer ranges showed extremely low WVTR values (<10(-6) g m(-2) day(-1)) in a Ca dot corrosion test. Furthermore, we observed selective infiltration among the two polymers [perfluoroalkoxy alkane (PFA) and PET] by a preferential growth of Al2O3 in the PET polymer that might be based on effective functional group anchoring in the ALI process. Then, we demonstrated a novel strategy by employing such a selective infiltration procedure and encapsulating individual segments of 144 Ca dots by Al2O3-PET hybrid thin films on the PFA polymer substrate rather than wrapping the whole thing together for the stretchable gas-encapsulation film. Regardless of stretching, it showed an extremely low WVTR (<10(-7) g m(-2) day(-1)) and is proposed as a highly promising hermetic sealing alternative in stretchable, flexible, and foldable electronic display technologies. English American Chemical Society LIGHT-EMITTING DEVICES BARRIER PROPERTIES PERMEATION DEPOSITION VAPOR TRANSPARENT AL2O3 PERMEABILITY DEGRADATION MECHANISMS Selective Infiltration in Polymer Hybrid Thin Films as a Gas-Encapsulation Layer for Stretchable Electronics Article 10.1021/acsami.9b19269 1 ACS Applied Materials & Interfaces, v.12, no.7, pp.8817 - 8825 ACS Applied Materials & Interfaces 12 7 8817 8825 scie scopus 000515214300104 2-s2.0-85080071157 Nanoscience & Nanotechnology Materials Science, Multidisciplinary Science & Technology - Other Topics Materials Science Article LIGHT-EMITTING DEVICES BARRIER PROPERTIES PERMEATION DEPOSITION VAPOR TRANSPARENT AL2O3 PERMEABILITY DEGRADATION MECHANISMS atomic layer infiltration (ALI) stretchable display selective infiltration selective encapsulation Al2O3-polymer hybrid thin layer Ca corrosion test water vapor transmission rate (WVTR)