LEE, KR EUN, KY RHEE, JS 2024-01-19T18:08:42Z 2024-01-19T18:08:42Z 2022-03-07 1995 0272-9172 https://pubs.kist.re.kr/handle/201004/119057 English MATERIALS RESEARCH SOC Structure and mechanical properties of nitrogen incorporated diamond-like carbon films Conference 1 Symposium on Thin Films - Stresses and Mechanical Properties V, at the 1994 Fall Meeting of the Materials-Research-Society, v.356, pp.233 - 238 Symposium on Thin Films - Stresses and Mechanical Properties V, at the 1994 Fall Meeting of the Materials-Research-Society 356 233 238 US BOSTON, MA 1994-11-28 THIN FILMS: STRESSES AND MECHANICAL PROPERTIES V A1995BD53A00035 2-s2.0-0029226711 Proceedings Paper