LEE, KR BAIK, YJ EUN, KY 2024-01-19T18:09:31Z 2024-01-19T18:09:31Z 2022-03-07 1993 0272-9172 https://pubs.kist.re.kr/handle/201004/119065 English MATERIALS RESEARCH SOC DEPENDENCE OF RESIDUAL-STRESS OF DIAMOND-LIKE CARBON-FILMS ON PRECURSOR GASES AND PROCESS PARAMETERS OF RF PACVD Conference 10.1557/PROC-308-101 1 Symposium on Thin Films: Stresses and Mechanical Properties IV, at the 1993 Spring Meeting of the Materials-Research-Society, v.308, pp.101 - 106 Symposium on Thin Films: Stresses and Mechanical Properties IV, at the 1993 Spring Meeting of the Materials-Research-Society 308 101 106 US SAN FRANCISCO, CA 1993-04-12 THIN FILMS: STRESSES AND MECHANICAL PROPERTIES IV A1993BZ55E00016 2-s2.0-0027799072 Proceedings Paper