Choi, Jae Myeong Jung, Beomsic Park, Jong-Keuk Kim, Won Mok Lee, Doh-Kwon Jeong, Jeung-hyun Lee, Taek Sung Cho, Jea-Young Ju, Byeong-Kwon Kim, Inho 2024-01-19T18:34:14Z 2024-01-19T18:34:14Z 2021-09-04 2019-12 1062-7995 https://pubs.kist.re.kr/handle/201004/119300 A laser-fired contact (LFC) process is one of the techniques for making local electrical contacts at the rear side of passivated emitter and rear cell (PERC) solar cells. In the LFC process, opening of the passivated dielectric layers and alloying of Si and Al need to be made in a single step laser process. For this reason, the LFC process is accompanied by the loss of Al and the laser damage to the Si wafer. In this study, we present a novel multistep LFC process combining the conventional LFC and laser-induced forward transfer (LIFT) processes. The modified LFC scheme we proposed consists of three steps: (a) opening of the passivation layers and partial alloying of Al-Si, (b) additional deposition of Al on the local contact holes, and (c) post laser firing of the transferred Al. Applying the modified LFC process to the PERC cells of 1.0 cm(2) of area, we demonstrate the effective recombination velocity of the laser-processed wafers can be remarkably reduced while maintaining the low contact resistance. The best of the PERC solar cell fabricated by the modified LFC process exhibited an efficiency of 19.5% while the conventional LFC-PERC cell showed 18.6%. The efficiency gains of the modified LFC-PERC cells was largely contributed by the enhanced open circuit voltage (V-oc) and fill factor (FF). English WILEY PASSIVATED EMITTER RECOMBINATION OPTIMIZATION Modified laser-fired contact process for efficient PERC solar cells Article 10.1002/pip.3187 1 PROGRESS IN PHOTOVOLTAICS, v.27, no.12, pp.1092 - 1103 PROGRESS IN PHOTOVOLTAICS 27 12 1092 1103 scie scopus 000484321000001 2-s2.0-85071363975 Energy & Fuels Materials Science, Multidisciplinary Physics, Applied Energy & Fuels Materials Science Physics Article PASSIVATED EMITTER RECOMBINATION OPTIMIZATION contact resistance crystalline silicon solar cells implied V-oc laser-fried contact PERC cell pulsed laser